File:B-tc-tisibondinginterface.png

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Summary

Description
English: Ti-Si bonding interface of a thermo compression wafer bond.
Date
Source

M. Wiemer and J. Frömel and J. Chenping, J. and M. Haubold and T. Gessner, Waferbond technologies and quality assessment (2008)

Author

Fraunhofer ENAS, D. Neumann

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  • 2011-03-30 11:36 (UTC) | Enaswiki | 256081 (bytes) | 1781×1388 | {{Information |Description = Ti-Si bonding interface of a thermo compression wafer bond. |Source = M. Wiemer and J. Frömel and J. Chenping, J. and M. Haubold and T. Gessner, Waferbond technologies and quality assessment (2008) |Date

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30 March 2011

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current12:28, 27 December 2011Thumbnail for version as of 12:28, 27 December 20111,781 × 1,388 (250 KB)SreeBot(Original text) : {{Information |Description = Ti-Si bonding interface of a thermo compression wafer bond. |Source = M. Wiemer and J. Frömel and J. Chenping, J. and M. Haubold and T. Gessner, Waferbond technologies and quality assessment (20

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