Journal of Micro/Nanopatterning, Materials, and Metrology

Journal of Micro/Nanopatterning, Materials, and Metrology is a peer-reviewed scientific journal published quarterly by SPIE. It covers science, development, and practice of micro and nanofabrication processes and metrology.[1] Established in 2002 under the name Journal of Microlithography, Microfabrication, and Microsystems, it was subsequently retitled to Journal of Micro/Nanolithography, MEMS, and MOEMS in 2007. The journal title was changed to its current name in 2021.[2]

Journal of Micro/Nanopatterning, Materials, and Metrology
DisciplineMicrolithography, nanolithography, metrology
LanguageEnglish
Edited byHarry Levinson
Publication details
Former name(s)
  • Journal of Microlithography, Microfabrication, and Microsystems (2002–2006)
  • Journal of Micro/Nanolithography, MEMS, and MOEMS (2007–2020)
History2002–present
Publisher
FrequencyQuarterly
2.3 (2022)
Standard abbreviations
ISO 4J. Micro/Nanopatterning Mater. Metrol.
Indexing
CODENJMMMIH
ISSN1932-5150 (print)
2708-8340 (web)
OCLC no.1249108189
Links

The editor-in-chief of the journal is Harry Levinson (HJL Lithography).[1]

Abstracting and indexing

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The journal is abstracted and indexed in:

According to the Journal Citation Reports, the journal has a 2022 impact factor of 2.3.[8]

References

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  1. ^ a b "Journal of Micro/Nanopatterning, Materials, and Metrology". SPIE. Retrieved May 22, 2024.
  2. ^ Journal of Micro/Nanopatterning, Materials, and Metrology (JMMMIH; 2708-8340) – via CASSI
  3. ^ a b c d "Web of Science Master Journal List". Intellectual Property & Science. Clarivate. Retrieved May 22, 2024.
  4. ^ "Journal of Micro/Nanopatterning, Materials, and Metrology". MIAR: Information Matrix for the Analysis of Journals. University of Barcelona. Retrieved May 22, 2024.
  5. ^ "Content/Database Overview - Compendex Source List". Engineering Village. Elsevier. Retrieved May 22, 2024.
  6. ^ "Inspec list of journals" (PDF). Inspec. Institution of Engineering and Technology. Archived from the original (PDF) on May 5, 2022. Retrieved May 22, 2024.
  7. ^ "Journal of Micro/Nanopatterning, Materials, and Metrology". Scopus Preview. Elsevier. Retrieved May 22, 2024.
  8. ^ "Journal of Micro/Nanopatterning, Materials, and Metrology". 2022 Journal Citation Reports (Science ed.). Clarivate. 2023 – via Web of Science.
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