Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.[1]
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| Names | |
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| Systematic IUPAC name
Trichloro(fluoro)silane | |
| Other names
Silicon trichloride fluoride
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| Identifiers | |
| ChemSpider | |
PubChem CID
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CompTox Dashboard (EPA)
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| Properties | |
| SiCl3F | |
| Molar mass | 153.43 g/mol |
| Density | 1.477g/cm3 |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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References
edit- ^ "Preparation of mixed-halogen halo-silanes, US 7030260 B2". Retrieved 11 October 2013.
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