Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.[1]
![]() | |
Names | |
---|---|
Systematic IUPAC name
Trichloro(fluoro)silane | |
Other names
Silicon trichloride fluoride
| |
Identifiers | |
ChemSpider | |
PubChem CID
|
|
CompTox Dashboard (EPA)
|
|
Properties | |
SiCl3F | |
Molar mass | 153.43 g/mol |
Density | 1.477g/cm3 |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
|
References
edit- ^ "Preparation of mixed-halogen halo-silanes, US 7030260 B2". Retrieved 11 October 2013.