List of MEMS foundries

The list below provides an overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication. The attribute type is for Integrated Device Manufacturer, Pure-play or Research Institute business model.

Company Service Substrate materials Production volume Wafer diameters (in inches) Type Headquartered country
Asia Pacific Microsystems, Inc. MEMS Foundry Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers High volume production 6 Pure-play  Taiwan
Atomica MEMS, biochip, sensor and photonics manufacturing, including custom design, development, prototyping, and high-volume production Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates High-volume production 6, 8 Pure-play  United States
C2MI Customized MEMS: process, manufacturing, packaging, characterization, failure analysis and reliability. Silicon, SOI, glass, and CMOS-wafers. R&D, prototyping and pilot line. 8 Research Institute  Canada
CEA-Leti Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging Silicon, SOI, glass, and CMOS-wafers. R&D recurrent batches and pilot line. 8, 12 Research Institute  France
CSEM MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments. Lithium niobate and silicon carbide processing are notable technology bricks. Silicon, SOI, lithium niobate, silicon carbide, fused silica, quartz, glass. Prototyping, small & medium volume production 6 Research Institute  Switzerland
Fraunhofer Institute for Silicon Technology (ISIT) MEMS design & process development, main Fraunhofer site for post-CMOS, MEMS, electroplating, CMP Silicon, SOI, glass, GaN and CMOS. Proof-of-concept, prototyping, small volume production 8 Research Institute  Germany
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS) MEMS design & process development, Fraunhofer focus location for specialized MEMS-processes Silicon, SOI. Proof-of-concept, Prototyping, small volume production 8 Research Institute  Germany
Hanking Electronics Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging. Silicon High volume production 8 IDM  China
IMEC Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch ) Prototyping, low and medium volume production; transfer to foundry for high volume 8, 12 Research Institute  Belgium
Micronit Customised MEMS design and manufacturing Silicon and SOI, borosilicate glass or Polymer; structured wafer Prototyping, low and medium volume production; transfer to foundry for high volume 6, 8 Pure-play  Netherlands
LioniX International Customized MEMS design, custom process development, prototyping and production. Silicon, SOI, fused silica, borosilicate glasses, thermally oxidized silicon. Proof of concept, prototyping, pilot production, small and medium volumes. 4, 6 Pure-play  Netherlands
Mapper MEMS process development and manufacturing Silicon, SOI and various glasses, piezoelectric materials Low volume and prototyping 4 Pure-play  Russia
Microfluidic Foundry BioMEMS design and manufacturing Silicon, Glass, SU8/PDMS, Polymer R&D, Mini volume production IDM  United States
nanoPHAB Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume. 2, 3, 4 Pure-Play  Netherlands
Nanoshift LLC Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies. Silicon, SOI, Glass, flex substrates, polymer, and other materials. Proof of concept, process development, prototyping, low to mid volume 2, 3, 4, and 6 IDM  United States
NEMS and MEMS Proto Fab (NMPF) MEMS manufacturing, microfabrication services Silicon, Glass, Quartz, SOI wafers Low to medium volume and prototyping 2, 4 Pure play  India
Philips Customized MEMS and Micro Assembly, process design and manufacturing, certified for medical devices Silicon, SOI, glass, quartz and CMOS-wafers. Prototyping, low and medium volume production 6, 8 Pure-play  Netherlands
Robert Bosch GmbH Customized MEMS process development and manufacturing. Optional: design, assembly, test, integration Silicon, SOI, Fused silica or glass, post-processing on 200mm-CMOS wafers Prototyping, development, medium and high volume 8 IDM  Germany
Safran Sensing Technologies MEMS Manufacturing Silicon, SOI Medium volume production 6 IDM  Switzerland

 Norway

Science Foundry MEMS process development for prototype and volume production; Standard Technologies MPWs Silicon, SOI, glass, quartz, polymer Prototyping and volume production 6 Pure-play  United States
Semefab MEMS manufacturing High volume production 4, 6 Pure-play  United Kingdom
Semi-Conductor Laboratory CMOS & MEMS design, manufacturing and packaging; microfabrication Silicon, SOI and various glasses From Low volume production 6,8 Research Institute  India
Silex Microsystems MEMS process development and manufacturing. Photolithography, etching, deposition and oxidation, bonding and glass packaging. Silicon Prototyping and high volume production 8 Pure-play  Sweden

 China

Silicon Sensing Systems MEMS process development and production Silicon Prototype fabrications through to mass production 8 IDM  United Kingdom

 Japan

SINTEF MiNaLab Customized MEMS, BioMEMS, piezoMEMS and Micro-optics. Modeling and design, process development, testing and characterization. Silicon, SOI, Glass Prototyping, low and medium volume production; transfer to foundry for high volume 6 Research Institute  Norway
Sony Semiconductor MEMS development and manufacturing Silicon, SOI Prototyping and high volume production 6, 8 IDM  Japan
STMicroelectronics MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones) Silicon High volume production IDM  Switzerland
Teledyne DALSA MEMS design and manufacturing with integration of individual foundry processes Silicon and polysilicon High volume production 6, 8 Pure-play  Canada
Teledyne Micralyne MEMS design, manufacturing and packaging; microfabrication Silicon, SOI and various glasses From scale-up to high volume production 6 Pure-play  Canada
Tower Semiconductor IC manufacturing Silicon High volume production 6, 8 Pure-play  Israel
TDK Tronics MEMS design and manufacturing Silicon, SOI and glass wafer Prototyping, low and high volume production 6 Pure-play  France

 Japan

TSMC MEMS design and manufacturing Silicon High volume production 6, 8, 12 Pure-play  Taiwan
uFluidix MEMS and Microfluidics manufacturing Silicon, glass, PDMS Low-Medium volume production Pure-play  Canada
United Microelectronics Corporation MEMS manufacturing Silicon High volume production 8 Pure-play  Taiwan
Wunderlichips Focus on PDMS devices, process development Silicon, SU8\PDMS R&D, low volume 4, 6, 8 Pure-play  Switzerland
X-Fab MEMS design and manufacturing Silicon and glass High volume production 6, 8 Pure-play  Germany